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An electron detector is used with the SEM to convert the radiation of interest into an electrical signal for manipulation and display by signal processing electronics, which to you and me is much like a television. Most SEM’s are equipped with an Everhart-Thornley (E-T) detector. It works in the following manner:
The Everhart–Thornley detector (E–T detector or ET detector) is a secondary electron and back-scattered electron detector used in scanning electron microscope s (SEMs). It is named after its designers, Thomas E. Everhart and Richard F. M. Thornley, who in 1960 published their design to increase the efficiency of existing secondary electron ...
Oct 24, 2012 · The most widely used secondary electron (SE) detector is the ET (Everhart-Thornley) detector, which is composed of a scintillator and a photomultiplier tube (PMT). The name of the ET detector is originated from the inventors of this detector, Everhart and Thornley. In a general-purpose SEM, the specimen is placed outside (underside) of the ...
The Everhart-Thornley Detector is a secondary electron detector used in scanning electron microscopes (SEMs). It is named after its designers, Thomas E. Everhart and R. F. M. Thornley who in 1960 published their design to increase the efficiency of existing secondary electron detectors by adding a light pipe to carry the photon signal from the scintillator inside the evacuated specimen chamber ...
Jan 1, 2022 · A little later, T. E. Everhart built a detector in which slow secondaries were accelerated to strike the scintillator with energies of about 10 keV, and the detailed design and assessment of this were completed by R. F. M. Thornley (Fig. 13). Thereafter the electron multiplier, which had served its purpose, was superseded by the much more convenient and efficient new detector.
Everhart-Thornley (E-T) detector • It is mounted on the wall of the specimen chamber and it views the specimen laterally. • SE moving towards the detector are absorbed by the collector and are directed towards scintillator. • When the electrons hit the scintillator layer, photons are generated inside the scintillator.
Figure 1(a): In-lens (top) and E-T (bottom) SEI of an Au-coated diamond around an area sputtered by the Cs+ beam of a N50 ion probe. Eo = 10 kV. Cs spatter is visible in the INL SEI. Figure 2: Signal profiles from images in fig.1(a). Figure 4: 50mm WD E-T SED after subtraction of an inverted, scaled BSE image.
